항 목 |
Specification |
Remark |
Maximal diameter of Cutting Crystal Rod |
<100mm(Ø457mm blade plate solution: 100mm) |
|
Maximal length of Cutting Crystal Rod |
350mm |
|
Cutting feed speed |
1~ 99mm/min |
|
Cutting return speed |
1~ 999mm/min |
|
Blade plate |
Ø422mm(diameter) 2100r/min(rotational velocity) |
|
Blade standard |
Ø422mm(external diameter) Χ Ø152mm(interior diameter) |
|
Stepping deviation of feeding |
±0.007mm(testing with 1mm feeding step) |
|
Rang of wafer thickness |
0.001 ~ 40.000mm (Standard type) |
|
0.001 ~ 58.000mm(Deep blade plate solution) |
|
Adjustment of crystal direction |
Horizontal range(X)±7° (resolution:2´) |
|
Vertical range(Y)±7° (resolution:2´) |
|
Power of spindle motor |
1.5KW |
|
Power of cooling motor |
0.15KW |
|
Power |
AC380V ±380V Χ10% 50 Hz±1Hz 2.5KW |
|
Source of air |
0.4 ~ 0.7MPa |
|
Dimension |
1100mm Χ 660mm Χ 2230mm |
|
Weight |
1100Kg |
|
Working Condition |
20℃±5℃(temperature) |
|
55%±15%(humidity) |
|